ISO/TC 209 Standards and Drafts - ISO 14644-6
ISO 14644, Cleanrooms and associate controlled environments - Part 6: Vocabulary
Since it is tentatively proposed that the content of this document will contain terms from ISO 14644-1, -2, -3, -4, -5, and -7, this document is scheduled to proceed to Standard stage after each of these documents has been published as a Standard. Due to the cancellation by ISO due to the length of time subsequent to its proposal, ISO 14644--6 was resubmitted as a New Work Item in late 2003. It is anticipated that the document will be "fast tracked" through the ISO process.
This document will serve to harmonize the definitions of terms used in describing materials and processes relating to cleanrooms and associated controlled environments.